Description
Applications
- Semiconductor
- Biotech
- Pharmaceutical
Features
- Metal to metal diaphragm seal
- Low particle entrapment
- 100% helium leak tested
- 10 Ra or 5 Ra microinch internal surface
Specifications
- Maximum Operating Pressure : 3000 psig(210 barg) @ 100℉(38℃)
- Operating Temperature Range : -10℉(-23℃) to 150℉(65℃)
Assembly and Packaging is performed in the clean room of Class 10. Valves are packed with anti-static polyethylene bag that is pressured into the high purity nitrogen gas.
Cleaning & Testing– Passivation is done at Nitrogen environment. Fine cleaning is done by Ultrasonic cleansing with resistivity over 18M.Q D.I. water after finishing the passivation. Inboard helium leak tested to a rate of 4 x 109cm3/s
